AVS 66th International Symposium & Exhibition | |
Spectroscopic Ellipsometry Focus Topic | Wednesday Sessions |
Session EL+EM-WeA |
Session: | Spectroscopic Ellipsometry: Novel Applications and Theoretical Approaches |
Presenter: | Stefan Zollner, New Mexico State University |
Authors: | S. Zollner, New Mexico State University F. Abadizaman, New Mexico State University |
Correspondent: | Click to Email |
The optical constants of single-crystalline, polycrystalline, and thin films of Ni from 0.06 to 6 eV are determined from spectroscopic ellipsometry at an angle of incidence of 70̊. The experimental data are analyzed using three alternative methods. In the first method, the dielectric function is written as a sum of Lorentz and Drude oscillators. The second method writes the dielectric function as a product of these oscillators (Kukharskii product). In the third method, a Drude model with frequency dependent scattering rate and plasma frequency is used. We used two Drude terms in the sum model to account for d- and s-electrons. The plasma frequencies were found to be 11.9 eV and 4.86 eV for d- and s-electrons, respectively, leading to a DC conductivity of about 80,000 (1/Ωcm) at 300 K, compared to the electrical DC conductivity of 143,000 (1/Ωcm) reported previously. Furthermore, the model reveals a very large free-electron contribution to the optical constants of Ni, which disproves earlier claims about their insignificance. We also employ graphical techniques to find the plasma frequencies and free-electron scattering rates, which agree well with the parameters found from the first and the second methods.
To prepare clean samples and reduce the thickness of the overlayers, the samples were maintained in ultrahigh vacuum at a temperature of 750 K for 6 hours and then cooled down overnight. A surface roughness thickness of 1-3 nm was found using atomic force microscopy and x-ray reflectivity.