| AVS 65th International Symposium & Exhibition | |
| Vacuum Technology Division | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| VT-TuP1 Characterization and Imaging of Surface Acoustic Waves on GaAs with Raman Spectroscopy Brian Rummel, University of New Mexico, M.D. Henry, Sandia National Laboratory, S.M. Han, University of New Mexico |
| VT-TuP2 Sapphire MEMS based Capacitance Manometer for Vacuum Freeze-Drying Device Masashi Sekine, M. Soeda, T. Ishihara, M. Nagata, Azbil Corporation, Japan |
| VT-TuP3 Development of Vacuum Equipment Trainer (VET) Systems for Off-site Students Delmer Smith, N. Louwagie, Normandale Community College |
| VT-TuP4 Vacuum System of the SuperKEKB Main Ring in the Phase - 2 Commissioning Yusuke Suetsugu, K. Shibata, T. Ishibashi, M. Shirai, S. Terui, K. Kanazawa, H. Hisamatsu, KEK, Japan |
| VT-TuP5 Smart Diagnostics for Dry Vacuum Pumps Running in Semiconductor Processes Wan-Sup Cheung, J. Lim, KRISS, Republic of Korea, N.K. LEE, J.B. LEE, T.J. Park, T.H. Kim, SK Hynix, Republic of Korea |
| VT-TuP6 Commissioning of Vacuum System for Positron Damping Ring for SuperKEKB Kyo Shibata, Y. Suetsugu, T. Ishibashi, M. Shirai, S. Terui, K. Kanazawa, H. Hisamatsu, KEK, Japan |
| VT-TuP7 Development of a Measurement System for Pressures in Vacuum Regions using an Optical Method Yoshinori Takei, K. Arai, H. Yoshida, Y. Bitou, S. Telada, T. Kobata, National Institute of Advanced Industrial Science and Technology (AIST), Japan |
| VT-TuP8 Study on a Performance of a Sniffer Leak Detector based on EN 14624 Kenta Arai, H. Yoshida, National Institute of Advanced Industrial Science and Technology (AIST), Japan |
| VT-TuP9 Elimination of Electron-Beam-Induced Carbonaceous Contamination in SEMs and the new RGM 10100 NIST Contamination Testing Artifact Andras Vladar, K. Purushotham, National Institute of Standards and Technology (NIST) |
| VT-TuP11 Extreme 2 Million Liter/sec Hydrogen Pump Speed Measurements of C-2W Divertors Ernesto Barraza-Valdez, A. Van Drie, TAE Technologies |
| VT-TuP12 KICT Dirty Thermal Vacuum Chamber: design, fabrication, and performance test T. Chung, Korea Institute of Civil Engineering and Building Technology, Republic of Korea, Jong Yeon Lim, Korea Research Institute of Standards and Science, Republic of Korea, Y. Yoo, hss. Shin, Korea Institute of Civil Engineering and Building Technology, Republic of Korea |