| AVS 65th International Symposium & Exhibition | |
| Plasma Science and Technology Division | Tuesday Sessions |
| Session PS-TuP |
| Session: | Plasma Science and Technology Division Poster Session |
| Presenter: | Wan-Ting Chiu, National Tsing-Hua University, Taiwan, Taiwan, Republic of China |
| Authors: | W.T. Chiu, National Tsing-Hua University, Taiwan, Taiwan, Republic of China I.N. Yeh, National Tsing-Hua University, Taiwan, Republic of China K.C. Leou, National Tsing-Hua University, Taiwan, Republic of China |
| Correspondent: | Click to Email |
Microwave plasma discharges have been widely employed for diamond synthesis. In this work, fluid model numerical simulation analysis, using a commercial available code, COMSOL-Multi-physics, has been conducted for microwave hydrogen plasma discharges operated at 2.45 GHz. The simulation model consists of all basic physical mechanisms, including electromagnetics, plasma discharge, gas flow and heat transfer, along with gas phase and surface reactions of gaseous species and charged particles. For our first study, we investigated a plasma reactor based on the TM02 mode microwave applicator and a quartz dome. The simulation analysis was first employed to fine tune the structure dimension maximize the coupling of the 2.45 GHz microwave to the desired waveguide mode, TM02, while minimizing its coupling to the major competing mode TM01. The simulation analysis with plasma discharge shows that a plasma ball is formed above the substrate stage for certain operating conditions, while a separate plasma discharge appears if operated outside those operating “window”, a common characteristics of microwave plasma discharge operated under microwave cavity resonator mode. Parametric analysis of plasma discharge characteristics for different gas pressure and microwave power have been carried out. Detailed simulation results will be presented.
Acknowledgement :
Work supported by the Ministry of Science and Technology (MOST) of ROC/Taiwan