| AVS 65th International Symposium & Exhibition | |
| Advanced Ion Microscopy Focus Topic | Thursday Sessions |
| Session HI+AS-ThM |
| Session: | Advanced Ion Microscopy & Surface Analysis |
| Presenter: | Tom Wirtz, Luxembourg Institute of Science and Technology (LIST), Luxembourg |
| Authors: | T. Wirtz, Luxembourg Institute of Science and Technology (LIST), Luxembourg O. De Castro, Luxembourg Institute of Science and Technology (LIST) J. Lovric, Luxembourg Institute of Science and Technology (LIST) J.-N. Audinot, Luxembourg Institute of Science and Technology (LIST), Luxembourg |
| Correspondent: | Click to Email |
In 2015, we first presented a Secondary Ion Mass Spectrometry (SIMS) system which we specifically developed for the Zeiss ORION NanoFab Helium Ion Microscope (HIM) [1]. This SIMS system is based on (i) specifically designed secondary ion extraction optics coupled with post-acceleration transfer optics, providing maximized extraction efficiency while keeping a finely focussed primary ion beam for highest lateral resolution, (ii) a compact floating double focusing magnetic sector mass spectrometer allowing operation in the DC mode at full transmission (and hence avoiding duty cycles like in TOF systems that either lead to very long acquisition times or, for a same acquisition time, intrinsically limit the sensitivity) and (iii) a specific detection system allowing the detection of several masses in parallel. We have demonstrated that our instrument is capable of producing (i) mass spectra with high mass resolution, (ii) very local depth profiles and (iii) elemental SIMS maps with lateral resolutions down to 12 nm [1-5]. Furthermore, HIM-SIMS opens the way for in-situ correlative imaging combining high resolution SE images with elemental and isotopic ratio maps from SIMS [2,3,6]. This approach allows SE images of exactly the same zone analysed with SIMS to be acquired easily and rapidly, followed by a fusion between the SE and SIMS data sets [6]. Moreover, thanks to its depth profiling capability of the SIMS add-on, it is now possible to follow the chemical composition in real time during nano-patterning in the HIM for applications such as end-pointing.
Here, we will review the instrument performance and present a number of examples taken from various fields of applications, with a special emphasis on 3D reconstructions in materials science (battery materials, solar cells, micro-electronics) and on correlative HIM-SIMS bioimaging.
References:
[1] T. Wirtz, P. Philipp, J.-N. Audinot, D. Dowsett, S. Eswara, Nanotechnology 26 (2015) 434001
[2] T. Wirtz, D. Dowsett, P. Philipp, Helium Ion Microscopy, edited by G. Hlawacek, A. Gölzhäuser, Springer, 2017
[3] D. Dowsett, T. Wirtz, Anal. Chem. 89 (2017) 8957-8965
[4] P. Gratia, G. Grancini, J.-N. Audinot, X. Jeanbourquin, E. Mosconi, I. Zimmermann, D. Dowsett, Y. Lee, M. Grätzel, F. De Angelis, K.Sivula, T. Wirtz, M. K. Nazeeruddin, J. Am. Chem. Soc. 138 (49) (2016) 15821–15824
[5] P. Gratia, I. Zimmermann, P. Schouwink, J.-H. Yum, J.-N. Audinot, K. Sivula, T. Wirtz, M. K. Nazeeruddin, ACS Energy Lett. 2 (2017) 2686-2693
[6] F. Vollnhals, J.-N. Audinot, T. Wirtz, M. Mercier-Bonin, I. Fourquaux, B. Schroeppel, U. Kraushaar, V. Lev-Ram, M. H. Ellisman, S. Eswara, Anal. Chem. 89 (2017) 10702-10710