| AVS 63rd International Symposium & Exhibition | |
| Plasma Science and Technology | Thursday Sessions |
| Session PS-ThP |
| Session: | Plasma Science and Technology Division Poster Session |
| Presenter: | Jacqueline van Veldhoven, TNO Technical Sciences, Netherlands |
| Authors: | J. van Veldhoven, TNO Technical Sciences, Netherlands E. te Sligte, TNO Technical Sciences, Netherlands J.P.B. Janssen, TNO Technical Sciences, Netherlands I. Ament, Carl Zeiss SMT GmbH, Germany |
| Correspondent: | Click to Email |
Most ion sources that produce high-flux hydrogen ion beams, particularly gridded sources, perform best in the high energy range (keV) [1]. Alternatively, some plasma sources produce very-low-energy ions (<< 10 eV). However, in an intermediate energy range of 10-200 eV, to our knowledge, there are no hydrogen ion sources that produce high-flux beams.
Despite this absence, we believe such a source would be of interest to a variety of fields, such as surface passivation and treatment [1-3], solar winds [4], fusion reactors [5], and EUV sources [6].
A typical ion source that is known for its high fluxes at the relevant ion energy range is the end-Hall ion source. This source produces good results with argon and oxygen [7], but no report of it being used with hydrogen was found. This contribution shows the use of an end-Hall ion source with hydrogen. Both the flux and the ion energy distribution of the ion beam were measured using a Retarding Field Energy Analyzer (RFEA) for different settings of the source and at different positions.
At the lowest discharge voltage and highest discharge current where the signal is still stable (100 V, 4A), a maximum hydrogen ion flux of 8.2 · 1019 ions/m2/s was measured at an energy range of ~0-130 eV and at a distance of 11 cm.
References
[1] N. Oudini, G.J.M. Hagelaar, J.-P. Boeuf and L. Garrrigues, Journal of Applied Physics 109 (2011) 073310.
[1] J.C. Muller, Y. Ababou, A. Barhdadi, E. Courcelle, S. Unamuno, D. Salles and P. Siffert, Solar cells 17 (1986) 201-231.
[2] K. Srikanth, J. Shenal and S. Ashok, Nuclear Instruments and Methods in Physics Research B 88 (1994) 401-406.
[3] A. Slaoui, A. Barhdadi, J.C. Muller and P. Siffert, Applied Physics A 39(1986), 159-162.
[4] F.W. Meyer, P.R. Harris, C.N. Taylor, H.M. Meyer III, A.F. Barghouty, J.H. Adams, Nuclear Instruments and Methods in Physics Research B 269 (2011) 1316-1320.
[5] T. Ito, Y. Yamauchi, T. Hino, T. Shibayama, Y. Nobuta, K. Ezato, S. Suzuki, M. Akiba, Journal of Nuclear Materials 417 (2011) 1147-1149.
[6] A.N. Bykanov, N. Bowering, I.V. Fomenkov, D.C. Brandt, A.I. Ershov, O. Khodykin, W.N. Partlo, US 7,671,649 B2 (2010).
[7] L. Mahoney, D. Burtner and D. Siegfried, Society of Vacuum Coaters 49th Annual Technical Conference Proceedings (2006) 706.