AVS 63rd International Symposium & Exhibition
    Plasma Science and Technology Thursday Sessions
       Session PS-ThP

Paper PS-ThP2
Transport Line for Laser Multicharged Ion Implantation and Deposition System

Thursday, November 10, 2016, 6:00 pm, Room Hall D

Session: Plasma Science and Technology Division Poster Session
Presenter: MdHaider Shaim, Old Dominion University
Authors: M.H. Shaim, Old Dominion University
M.M. Rahman, Old Dominion University
O. Balki, Old Dominion University
A. Sarkissian, Plasmionic Technologies
M.L. Korwin-Pawlowski, University Du Quebec en outaouais, Canada
H.E. Elsayed-Ali, Old Dominion University
Correspondent: Click to Email
Components of a transport line for a laser multicharged ion (MCI) source are constructed and tested. These components are an einzel lens for ion focusing, parallel deflection plates for multicharged ion selection, electrostatic cylindrical ion energy analyzers for MCI energy-to-charge E/z selection, three-grid energy analyzer, and Faraday cup for time-of-flight ion detection . Aluminum and carbon MCIs are generated by a nanosecond Nd:YAG laser (wavelength 1064 nm, pulse width 7.4 ns) ablation of a target in a vacuum chamber. Time-of-flight and a three-grid retarding ion energy analyzers are used to determine the velocity and the charge state of the MCIs. A three-electrode cylindrical einzel lens is used to focus the MCIs. At a distance of 30 cm from the center of the focusing electrode of the einzel lens, Al1+ and Al2+ has a minimum beam diameter of ~1.5 mm, while for Al3+ and Al4+ the minimum beam diameter is ~2.5 mm. Simulation of the ion trajectories was done using SIMION 8.1. A high voltage pulse applied to a set of two parallel deflecting plates is used for the pickup of ions with different charge states according to their time-of-flight. The electrostatic ion energy analyzer combined with the time-of-flight measurement are used to resolve both E/z and z and obtain the energy distribution of each charge. The Overall energy resolution of the electrostatic ion energy analyzer for carbon MCI is 7 – 9%.