AVS 63rd International Symposium & Exhibition
    Plasma Science and Technology Thursday Sessions
       Session PS-ThP

Paper PS-ThP1
RF Assisted Reactive High Power Impulse Magnetron Sputtering Deposition of Titanium Nitride Thin Film for Plasmonic Applications

Thursday, November 10, 2016, 6:00 pm, Room Hall D

Session: Plasma Science and Technology Division Poster Session
Presenter: Ru-Jing Sun, National Tsing Hua University, Taiwan, Republic of China
Authors: R.J. Sun, National Tsing Hua University, Taiwan, Republic of China
B.H. Liao, Instrument Technology Research Center, Taiwan, Republic of China
C.-N. Hsiao, Instrument Technology Research Center, Taiwan, Republic of China
K.C. Leou, National Tsing Hua University, Taiwan, Republic of China
Correspondent: Click to Email
Titanium nitride (TiN) films have attracted a great deal of interests recently for applications in plasmonic devices in near-infrared wavelengths range. Here we report the optical properties of the TiN films prepared by using radio frequency power assisted reactive high power impulse magnetron sputtering (HIPMS) deposition technique. The TiN films were grown on either Si or glass substrates for a thickness up to 400 nm. A spectroscopic ellipsometer was used to measure the refraction index (n) and extinction coefficient ( k ) of the films. Measurements results show that, depending on the deposition conditions, the optical properties of the TiN films vary over a wide range, from those of typical TiN film as deposited by conventional magnetron sputtering, to those of metallic copper or gold. Sheet resistance of the film was also measured by hall-effect method and strong correction between the optical and the electrical properties are demonstrated. Results from XRD analysis also reveal that the lowest film resistivity occurs for TiNx film with a stoichiometric composition, as expected. These results demonstrate that one can fine tune the optical property of TiN film by simply controlling the deposition conditions to meet the requirements of optical devices.