AVS 61st International Symposium & Exhibition
    MEMS and NEMS Wednesday Sessions

Session MN+PS-WeA
Emerging Materials and Fabrication Technologies for MEMS/NEMS

Wednesday, November 12, 2014, 2:20 pm, Room 301
Moderators: Sushma Kotru, The University of Alabama, Meredith Metzler, Cornell University


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:20pm MN+PS-WeA1 Invited Paper
Organic Sensors and Actuators Patterned by Inkjet Printing
Tse Nga (Tina) Ng, PARC (Palo Alto Research Center), a Xerox Company, J. Kim, W.S. Kim, Simon Fraser University, Canada, K.S. Kwon, Soonchunhyang University, South Korea
3:00pm MN+PS-WeA3
Microfabrication by Etching for Carbon Nanotube Composite Sheets
Nathan Boyer, J. Rowley, D.D. Allred, Brigham Young University, S. Liddiard, Moxtek, Inc, R.R. Vanfleet, R.C. Davis, Brigham Young University
3:20pm MN+PS-WeA4
High Aspect Ratio Magnetic MEMS Fabricated using Carbon Nanotube Templated Microfabrication
Robert Davis, L. Barrett, D. Barton, R.R. Vanfleet, D.D. Allred, Brigham Young University
4:20pm MN+PS-WeA7
Sub-100nm Thin Polycrystalline Diamond Nanomechanical Torsional Resonators
Rui Yang, Z. Wang, J. Lee, C.A. Zorman, P.X.-L. Feng, Case Western Reserve University
4:40pm MN+PS-WeA8
Temperature Compensated Graphene Nanomechanical Resonators
Jaesung Lee, Case Western Reserve University, H.-Y. Chiu, University of Kansas, P.X.-L. Feng, Case Western Reserve University
5:00pm MN+PS-WeA9
A Porous Material for Improving Cantilever Q in Air and Liquid for Resonant Mechanical Sensing
Steven Noyce, R.C. Davis, R.R. Vanfleet, Brigham Young University, H.G. Craighead, Cornell University
5:20pm MN+PS-WeA10
XPS to Investigating Spatial and Temporal Modification of PDMS Platforms for Micro-Fluidic Devices
Marshal Dhayal, CSIR- Centre for Cellular and Molecular Biology, India
5:40pm MN+PS-WeA11
A Microplasma-based Sputtering System for Direct-Write, Micropatterning of Metal Structures
Edwin Burwell, A.C. Barnes, P.X.-L. Feng, M. Sankaran, C.A. Zorman, Case Western Reserve University