AVS 61st International Symposium & Exhibition | |
MEMS and NEMS | Wednesday Sessions |
Session MN+PS-WeA |
Session: | Emerging Materials and Fabrication Technologies for MEMS/NEMS |
Presenter: | Tse Nga (Tina) Ng, PARC (Palo Alto Research Center), a Xerox Company |
Authors: | T.N. Ng, PARC (Palo Alto Research Center), a Xerox Company J. Kim, Simon Fraser University, Canada W.S. Kim, Simon Fraser University, Canada K.S. Kwon, Soonchunhyang University, South Korea |
Correspondent: | Click to Email |
Organic materials have been demonstrated as good candidates for large-area sensors, because they allow wide tolerance of sensor geometry and thickness, which would ease fabrication problems such as strain induced cracking on deformable plastic platforms. Organic electronic materials can be deposited and patterned by low-cost printing tools such as inkjet printers. Notably, the printing process is compatible with many substrates ranging from plastics to fibers, to potentially integrate electronics on any surface. At Palo Alto Research Center, we have developed processes for printed electronics that enable new form factors and applications in flexible sensors and circuits. In conjunction with university collaborators, here we present examples of organic mechanical sensors and actuators fabricated by facile solution processes.
The first example is a capacitive pressure sensor patterned by block copolymers. Different microstructures (hemisphere, cones, nano-needles) are explored for the dielectric film, and the dielectric with nano-needles showed the highest sensitivity, with the relative capacitance change up to 176%/kPa. The capacitor with the nano-needle filler was integrated with an inkjet printed OTFT to provide current output. The device sensitivity is comparable to the sensitivity of human skin and will be useful for tactile sensing applications on a wide range of surfaces.
In a second example, we have fabricated a bimorph actuator from electroactive polymer blends with ionic liquid. The polymer blends allow low-voltage operation, and we found that the actuator displacement increases with larger gradient difference in ionic liquid content. A maximum strain of 0.48% was observed. The electroactive polymers are compatible with extrusion printing and have the potential to be patterned through layer-by-layer printing for incorporation into 3d structures.