| AVS 61st International Symposium & Exhibition | |
| MEMS and NEMS | Wednesday Sessions |
| Session MN+PS-WeA |
| Session: | Emerging Materials and Fabrication Technologies for MEMS/NEMS |
| Presenter: | Jaesung Lee, Case Western Reserve University |
| Authors: | J. Lee, Case Western Reserve University H.-Y. Chiu, University of Kansas P.X.-L. Feng, Case Western Reserve University |
| Correspondent: | Click to Email |
Graphene-based atomically-thin two-dimensional (2D) nanostructures have emerged as new building blocks for novel nanoelectromechanical systems (NEMS) [1], which can enable nanodevices with unprecedented performances such as ultrasensitive detectors and highly tunable oscillators [2] In addition to its excellent mechanical properties, such as ultralow areal density (rA=0.74fg/µm2), ultrahigh strain limit (~25%), and large Young’s modulus (EY~1TP), graphene has superior thermal properties, which can enable large temperature range operations and ultra-stable high temperature performances. In addition, the unique negative thermal expansion coefficient of graphene can be employed to tune the device tension and thus its resonance behavior through controlling the device temperature. To date, most experimental investigations of graphene resonators are at room temperature or below, with high temperature operation remaining largely unexplored.
In this work, we experimentally study graphene resonators from room temperature to ~600K and study their resonance characteristics by measuring the thermomechanical noise. Our graphene resonators show relatively small frequency shifts from 300K to 600K due to natural temperature compensation from the different thermal expansion coefficients of graphene and other structural metals. We further examine temperature profile in graphene resonators, and establish resonator models with wide range temperature operation, elucidating temperature compensation mechanisms in graphene resonators. This study will help improve the understanding and development of both temperature-sensitive and insensitive 2D NEMS resonators, which can lead towards future large temperature range and high temperature application of 2D NEMS.
References:
[1] J. Lee, P. X.-L. Feng, IEEE International Frequency Control Symposium (IFCS’12), DOI: 10.1109/FCS.2012.6243742 (7 pages), Baltimore, MD, May 21-24 (2012).
[2] C. Chen, J. Hone, Proc. IEEE101, 1766-1779 (2013).
[2] C. Chen, S. Rosenblatt, K. I. Bolotin, W. Kalb, P. Kim, I. Kymissis, H. L. Stormer, T. F. Heinz, and J. Hone, Nature Nanotech.4, 861- 867 (2009).