AVS 60th International Symposium and Exhibition
    Plasma Science and Technology Thursday Sessions
       Session PS-ThM

Paper PS-ThM4
Accuracy of the Step Sheath Approximation

Thursday, October 31, 2013, 9:00 am, Room 104 C

Session: Plasma Modeling
Presenter: M.A. Sobolewski, NIST
Correspondent: Click to Email

In modeling plasma sheaths, it is useful to approximate the electron density profile by a sharp, step-like drop between a neutral (or quasineutral) region and an electron-free region. This approximation allows rapid and efficient numerical calculations of sheath properties, and, when combined with other assumptions, allows predictions for sheath properties to be calculated analytically. Nevertheless, the approximation must result in some loss of accuracy. Here, the accuracy of the step approximation was investigated by comparisons with exact solutions for Poisson's equation in the sheath and with experimental measurements of current and voltage waveforms and ion energy distributions. The measurements were performed in pure argon gas and argon mixtures in a radio-frequency (rf) biased, inductively coupled plasma reactor. Experimental conditions were chosen to cover the intermediate-frequency regime, where the rf period is comparable to ion transit times and the ion current oscillates strongly during the rf cycle. In general, the errors introduced by the step approximation were small but not negligible. The displacement current and time-dependent ion current were both affected by the step approximation, resulting in errors that are more apparent in the phase of the sheath impedance than in its magnitude. The effects on ion energy distributions are most noticeable in the amplitude of the low-energy peak, which is sensitive to the choice of boundary conditions on the plasma side of the step. Using the exact Poisson solution in place of the step approximation results in a modest improvement in the agreement with experiment.