AVS 60th International Symposium and Exhibition
    Spectroscopic Ellipsometry Focus Topic Wednesday Sessions
       Session EL+AS+EM+SS+TF-WeA

Invited Paper EL+AS+EM+SS+TF-WeA3
Spectroscopic Ellipsometry – A Perspective

Wednesday, October 30, 2013, 2:40 pm, Room 101 A

Session: Spectroscopic Ellipsometry: Perspectives and Novel Applications
Presenter: D.E. Aspnes, North Carolina State University
Correspondent: Click to Email
Since its initial development in the early 1970’s, spectroscopic ellipsometry (SE) has become the primary technique for determining optical properties of materials. In addition to the other historic role of ellipsometry, determining film thicknesses, SE is now widely used to obtain intrinsic and structural properties of homogeneous and inhomogeneous materials in bulk and thin-film form, including properties of surfaces and interfaces. Its nondestructive capability for determining critical dimensions has made SE indispensible in integrated-circuits technology. The presentation is directed toward those who are unfamiliar with SE but may feel that it could provide useful information in specific situations. Accordingly, I give some background and basic theory, then illustrate capabilities with a variety of applications. Probable directions for the future are also discussed.