AVS 59th Annual International Symposium and Exhibition
    Plasma Science and Technology Thursday Sessions
       Session PS-ThP

Paper PS-ThP4
Laser Thomson Scattering Measurements of Plasma Parameters in the Low Temperature Plasmas

Thursday, November 1, 2012, 6:00 pm, Room Central Hall

Session: Plasma Science and Technology Poster Session
Presenter: J.-H. Kim, Korea Reseach Institute of Standards and Science, Republic of Korea
Authors: J.-H. Kim, Korea Reseach Institute of Standards and Science, Republic of Korea
B.H. Seo, Korea Advanced Institute of Science and Technology, Republic of Korea
S.-J. You, Korea Reseach Institute of Standards and Science, Republic of Korea
D.J. Seong, Korea Reseach Institute of Standards and Science, Republic of Korea
Correspondent: Click to Email
Diagnostics of electron density and temperature play an important role for characterization of processing plasmas and basic plasma researches. Laser Thomson scattering is a one of the most accurate diagnostic technique for measuring electron density and temperature because of none-perturbation to plasma among various diagnostic techniques invented to measure plasma density and temperature. I will briefly review the method of Laser Thomson Scattering to measure the electron temperature and density. Electron energy probability functions (EEPFs) having a fine resolution of electron energy were measured in low-pressure inductively coupled plasma with laser Thomson scattering method (LTS) at various plasma conditions (rf powers and gas pressures) and compared with the EEPFs measured by a single Langmuir probe (SLP) at the same experimental conditions. The result of LTS showed that the measured electron density normally increases with the rf power and the gas pressure, and the electron temperature decreased with the rf power and the gas pressure. The results have a good agreement not only with the previous reports qualitatively but also with our SLP measurement result quantitatively. We have a plan to establish a standard of plasma measurement with this LTS, which will be discussed.