| AVS 59th Annual International Symposium and Exhibition | |
| Plasma Science and Technology | Thursday Sessions |
| Session PS-ThP |
| Session: | Plasma Science and Technology Poster Session |
| Presenter: | F.T. Molkenboer, TNO Technical Sciences, The Netherlands |
| Authors: | F.T. Molkenboer, TNO Technical Sciences, The Netherlands H.H.P.Th. Bekman, TNO Technical Sciences, The Netherlands F.H. Elferink, TNO Technical Sciences, The Netherlands T.J. Versloot, TNO Technical Sciences, The Netherlands E. Te Sligte, TNO Technical Sciences, The Netherlands N.B. Koster, TNO Technical Sciences, The Netherlands |
| Correspondent: | Click to Email |
In setups for plasma research there are in most cases several sensors available to monitor the plasma conditions. However there are also numerous plasma systems for non-research applications that have limited or no plasma diagnostics available at all.
To solve this problem we have designed, a so called plasma diagnostics box. The plasma diagnostics box is made out of two units, a sensor head and the data logger box containing the data logger, batteries and electronics, connected by a flexible tube.
The sensor head contains multiple stand-alone sensors. The prototype device contains five basic plasma monitoring sensors, a PT100 temperature sensor, a heat flux sensor, silicon photodiode, a double Langmuir probe and a Faraday cup for measuring several key plasma parameters
The two unique features of the plasma diagnostics box is that it is a complete standalone unit and that it can be placed within the vacuum/ plasma system. This means that there is no need for a feedthrough flange on the plasma/ vacuum system. However, if a feedthrough is available, the data logger box can be placed outside the vacuum, and the sensor head alone can be inserted in the system.
Because of the flexible connection the sensor head can be placed anywhere within the plasma. This makes it possible to characterise the plasma at different positions.
In this contribution we will discuss the design and manufacturing of the plasma diagnostics box. Besides the design we also will present the data we have measured with the plasma diagnostics box in one of our research plasma setups that we have available at TNO. The results obtained with these measurements will be benchmarked against the commercially available diagnostics on our research plasma setup.