AVS 59th Annual International Symposium and Exhibition
    Plasma Science and Technology Thursday Sessions
       Session PS-ThA

Paper PS-ThA6
Mechanical Optimization of a Plasma Source Device

Thursday, November 1, 2012, 3:40 pm, Room 25

Session: Plasma Sources
Presenter: S. Polak, Advanced Energy Industries Inc.
Authors: S. Polak, Advanced Energy Industries Inc.
M. Thornton, Advanced Energy Industries Inc.
D. Hoffman, Advanced Energy Industries Inc.
D. Carter, Advanced Energy Industries Inc.
Correspondent: Click to Email
A new, remote plasma source device (RPS) is being developed. From a mechanical standpoint, there are a number of unique challenges and areas for optimization. The RPS features high plasma density in a compact, mechanical envelope, resulting in high heat-flux and therefore requiring robust cooling solutions. Also, because the RPS has the ability to confine plasma within the chamber or project the plasma downstream, the locations and magnitudes of heat flux are dynamic, depending on the process. High and variable-density heat fluxes result in high temperatures and high thermal gradients, both of which lead to thermal-mechanical strain and stress within the components. Numerical models and finite-element simulations have been developed to predict the thermal and structural responses within the critical components in the RPS assembly and to mitigate structural failure of these components. Furthermore, because the RPS features high gas flow rates through a relatively small-volume chamber, optimization of the fluid flow becomes paramount to the ignition, stability, and efficiency of the plasma. Finite-volume, computational fluid dynamics (CFD) models were developed to characterize and optimize the gas flow into the chamber. We report on the development of these thermal-mechanical and fluid dynamics analysis tools, including correlation of the analytical models to empirical data. Also, we will discuss the parameters and techniques of optimization.