| AVS 59th Annual International Symposium and Exhibition | |
| Applied Surface Science | Monday Sessions |
| Session AS-MoA |
| Session: | Quantitative Surface Chemical Analysis, Technique Development, and Data Interpretation - Part 2 |
| Presenter: | L.S. Wielunski, Rutgers University |
| Authors: | L.S. Wielunski, Rutgers University R.A. Bartynski, Rutgers University |
| Correspondent: | Click to Email |
Rutherford Backscattering (RBS) of ~2MeV He ions is well known technique used in surface and thin film analysis. This technique is very sensitive to heavy elements (Au, Pt, Hf, In, Ru) present on surface or in thin film on lower mass substrate (Si, Ti, Cr, Fe, Ge), but have very limited sensitivity for low mass elements on heavy mass substrates. Numbers of examples will be shown for both cases.
Nuclear reaction analysis (NRA) is very good alternative for detection of low mass elements in a heavy elements substrates. This technique uses similar experimental set-up as RBS but is using a different ion beam and it detects different particle. Examples will be shown for Li detection on steel and in LiFePO4 crystal.
Detection of Hydrogen is not possible using RBS in a typical RBS geometry, and NRA can detect Hydrogen, but it require special high energy 15N beam (7MeV), but He Forward Scattering (FS) or Elastic Recoil Detection (ERD) can be used for Hydrogen detection and profiling. Examples of ERD will be shown and discussed.
Each of these techniques has its own limitations and advantages. Depth resolution and sensitivity will be discussed in details.