AVS 57th International Symposium & Exhibition
    Vacuum Technology Monday Sessions

Session VT+MS-MoA
Gas Analysis in Vacuum and Process Applications

Monday, October 18, 2010, 2:00 pm, Room Laguna
Moderator: S. Thornberg, Sandia National Laboratories


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Click a paper to see the details. Presenters are shown in bold type.

2:00pm VT+MS-MoA1 Invited Paper
Miniature Mass Spectrometers and Ambient Analysis by Mass Spectrometry
R.G. Cooks, R.J. Noll, Z. Ouyang, Purdue University
2:40pm VT+MS-MoA3
Accurate Determination of Molar Quantity for Gas in a Vacuum Chamber with Extreme Temperature Variations
H.C. Peebles, M.S. Benner, Sandia National Laboratories, T.K. Mehrhoff, Independent Contractor to Sandia National Laboratories
3:00pm VT+MS-MoA4
Hydrocarbon Measurements at ppb Level at 10Pa Absolute Pressure
R. Versluis, M.F. Dekker, TNO Science and Industry, Netherlands
3:40pm VT+MS-MoA6
Ratiometric and Absolute Partial Pressure Measurements with Low Mass Range Mass Spectrometers
G. Brucker, J. Rathbone, K. Van Antwerp, M.N. Schott, Brooks Automation, Inc.
4:20pm VT+MS-MoA8
Solving the Low Mass Range Mass Spectrometer Limitations (Zero Blast) using Electrostatic Ion Traps
P.C. Arnold, G. Brucker, J. Rathbone, Brooks Automation, Inc.
4:40pm VT+MS-MoA9
Ion Residence Times for Electron-Impact Ion Sources of Mass Spectrometers
R.E. Ellefson, REVac Consulting, M.F. Vollero, INFICON, Inc.
5:00pm VT+MS-MoA10
Performance Characteristics of a New Wide Range, Fast Settling Electrometer Design for a Residual Gas Analysis Mass Spectrometer
S. Billington, MKS Spectra Products UK, J. Blessing, MKS Instruments, R. Fletcher, P. Shaw, MKS Spectra Products UK