| AVS 57th International Symposium & Exhibition | |
| Vacuum Technology | Monday Sessions |
| Session VT+MS-MoA |
| Session: | Gas Analysis in Vacuum and Process Applications |
| Presenter: | P.C. Arnold, Brooks Automation, Inc. |
| Authors: | P.C. Arnold, Brooks Automation, Inc. G. Brucker, Brooks Automation, Inc. J. Rathbone, Brooks Automation, Inc. |
| Correspondent: | Click to Email |
The phenomena of typically unavailable resolution of low mass spectroscopic peaks (zero blast) will be presented along with a solution that allows clear resolution of those low mass peaks, for example, masses 1 to 4. A new mass spectrometer design composed of an electrostatic ion trap using anharmonic resonant trapping potentials will be shown to resolve this issue. The primary causes of poor low mass resolution will be presented. The background of the physical electronics of the problem will be discussed. The new mass spectrometer design will be described with respect to its effect on zero blast. A test program to demonstrate the solution and show results at scans of low mass will be presented.