| AVS 57th International Symposium & Exhibition | |
| Plasma Science and Technology | Tuesday Sessions |
| Session PS2-TuM |
| Session: | Plasma Diagnostics, Sensors and Control |
| Presenter: | D.R. Boris, NRL/NRC Postdoctoral Research Associate |
| Authors: | D.R. Boris, NRL/NRC Postdoctoral Research Associate S.G. Walton, Naval Research Laboratory M. Baraket, NRL/NRC Postdoctoral Research Associate E.H. Lock, Naval Research Laboratory R.F. Fernsler, Naval Research Laboratory |
| Correspondent: | Click to Email |
Plasma density measurements are an essential tool in understanding and controlling processing plasmas across a wide range of applications. Charge collection probes (Langmuir probes) are of limited utility in depositing plasmas, high pressure applications or in processes that require the use of reactive gases, as these environments result in unreliable data acquisition. Plasma frequency probes are an attractive alternative to Langmuir probes in such applications since they do not suffer significant performance degradation in these environments. Frequency probes are capable of measuring plasma density over a range of 108 to 1012 cm-3 and, it is possible to extract the plasma potential and electron temperature. This presentation details the use of plasma frequency probes, in a variety of different geometries, to measure plasma parameters in unique systems, such as plasma produced by electron beams, operating at higher pressures, or in reactive gases (O2 and SF6). Where possible these measurements are compared with Langmuir probe measurements for identical experimental parameters.