AVS 57th International Symposium & Exhibition
    Plasma Science and Technology Tuesday Sessions
       Session PS-TuP

Paper PS-TuP15
Computer Simulation of a Controllable Electron Beam Exciter

Tuesday, October 19, 2010, 6:00 pm, Room Southwest Exhibit Hall

Session: Plasma Science and Technology Poster Session
Presenter: D. Urrabazo, University of Texas at Dallas
Authors: D. Urrabazo, University of Texas at Dallas
M.J. Goeckner, University of Texas at Dallas
S. Thamban, University of Texas at Dallas
G. Padron-Wells, University of Texas ar Dallas
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We have developed a new chemical diagnostic based on a controlled electron beam. Specifically we make use of an inductively coupled plasma, electron extraction optics and traditional optical emission spectroscopy. In the work reported here, we make use of a computer simulation using the Comsol to investigate system characteristic and enhance the system performance. The axially-symmetric spatial distributions of the particle densities and electron temperature are calculated for varying pressure and power regimes. These simulation results will be compared to electrical probe measurements gathered from the experimental apparatus. This work is supported in part by NSF (Grant CBET- 0922962) and Verity Instruments.