| AVS 56th International Symposium & Exhibition | |
| Thin Film | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:00am | TF2-TuM1 Invited Paper How Surface Reactions Afford Ultra-Conformal CVD: A Zone Diagram and the Application of Suppressor Species J.R. Abelson, University of Illinois at Urbana-Champaign |
| 8:40am | TF2-TuM3 Invited Paper Functional and Conducting Polymer Thin Films by Vapor Deposition K. Gleason, Massachusetts Institute of Technology |
| 9:20am | TF2-TuM5 CVD of Three Aminosilanes on Silicon Oxide: Effect of Silane Concentration, Surface Characterization and Stability, and Cyanine Dye Adsorption M.R. Linford, F. Zhang, Brigham Young University, H. Samha, Southern Utah University, K. Sautter, Yield Engineering Systems, R.C. Davis, Brigham Young University |
| 9:40am | TF2-TuM6 Novel Precursors for CVD of Amorphous and Crystalline Cobalt Group Metal-Phosphide Films J. Rivers, R. Jones, The University of Texas at Austin |
| 10:40am | TF2-TuM9 Invited Paper Kinetic Study on InGaAsP-MOCVD Using Selective Area Growth and its Application to OEIC Device Fabrication Y. Shimogaki, The University of Tokyo, Japan |
| 11:20am | TF2-TuM11 OLED Encapsulation by Room Temperature Plasma-Assisted ALD Al2O3 Films W. Keuning, M. Creatore, E. Langereis, Eindhoven University of Technology, Netherlands, H. Lifka, P. van de Weijer, Philips Research Laboratories, Netherlands, M.C.M. van de Sanden, W.M.M. Kessels, Eindhoven University of Technology, Netherlands |
| 11:40am | TF2-TuM12 Controlled Doping of CVD Diamond with Mid-to-High Z Metals M.M. Biener, J. Biener, Lawrence Livermore National Laboratory, H. Obloh, Fraunhofer-Institut für Angewandte Festkörperphysik, Germany, S.O. Kucheyev, Y.M. Wang, Lawrence Livermore National Laboratory, W. Mueller-Sebert, Fraunhofer-Institut für Angewandte Festkörperphysik, Germany, B.S. El-Dasher, Lawrence Livermore National Laboratory, A. Kriele, Fraunhofer-Institut für Angewandte Festkörperphysik, Germany, N.E. Teslich Jr., Lawrence Livermore National Laboratory, C. Wild, Fraunhofer-Institut für Angewandte Festkörperphysik, Germany, A.V. Hamza, Lawrence Livermore National Laboratory |