| AVS 56th International Symposium & Exhibition | |
| Plasma Science and Technology | Wednesday Sessions |
| Session PS1-WeA |
| Session: | Plasma Modeling |
| Presenter: | D.J. Economou, University of Houston |
| Correspondent: | Click to Email |
High pressure (100s of torr) microplasma (length scale 100s of microns) discharges have potential applications as chemical microreactors, sensors, microelectromechanical systems (MEMS), and excimer radiation sources. Modeling and simulation of these systems, combined with plasma diagnostics, can provide critical information on fundamental discharge characteristics, and help extend the window of stable microdischarge operation. This talk will review the modeling and simulation methodologies used for microplasmas, with special emphasis on the coupling between plasma and neutral gas flows. The effect of operating conditions on gas temperature and in turn on discharge characteristics will be discussed in detail. Similarities and differences in modeling and operating characteristics between microdischarges and macroscopic discharges will be detailed. Simulation predictions will be discussed in light of spatially resolved plasma diagnostics used to measure important microdischarge properties (electron density and temperature, gas temperature, excited state densities, electric fields, etc.).
Work supported by the Department of Energy and the National Science Foundation