| AVS 53rd International Symposium | |
| MEMS and NEMS | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:40pm | MN-TuA3 Fabrication and Testing of NEMS Components Made from Nanocomposite Al-Mo Films D. Mitlin, University of California, Z. Lee, Lawrence Berkeley National Laboratory, C. Ophus, N. Nelson-Fitzpatrick, L.M. Fischer, University of Alberta, Canada, S. Evoy, National Institute of Nanotechnology, U. Dahmen, V. Radmilovic, Lawrence Berkeley National Laboratory |
| 3:00pm | MN-TuA4 Chemical Mechanical Planarization of BCB Polymer Films: Effect of Cure Temperature N. Ghalichechian, A. Modafe, M.I. Beyaz, R. Ghodssi, University of Maryland |
| 3:20pm | MN-TuA5 Borosilicate Glass Deep Etching in NLD Plasma by using Low GWP Gases Y. Morikawa, T. Hayashi, A. Kelly, K. Fuwa, K. Suu, ULVAC Inc., Japan |
| 4:00pm | MN-TuA7 Molded Electromechanical Shift-Register Memories G.M. McClelland, B. Atmaja, IBM Research Division, Almaden Research Center |
| 4:40pm | MN-TuA9 Molecular Vapor Deposition Integration with MEMS Manufacturing B. Kobrin, T. Zhang, N. Dangaria, J. Chinn, Applied Microstructures, Inc. |