| AVS 53rd International Symposium | |
| MEMS and NEMS | Tuesday Sessions |
| Session MN-TuA |
| Session: | Fabrication and Characterization of MEMS and NEMS |
| Presenter: | G.M. McClelland, IBM Research Division, Almaden Research Center |
| Authors: | G.M. McClelland, IBM Research Division, Almaden Research Center B. Atmaja, IBM Research Division, Almaden Research Center |
| Correspondent: | Click to Email |