| AVS 53rd International Symposium | |
| Exhibitor Workshop | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 11:00am | EW-ThL1 MM-16: New Spectroscopic Ellipsometer for Fast and Simple Advanced Materials Characterization P. Tivin, E. Teboul, Y. Ji, HORIBA Jobin Yvon Inc |
| 11:20am | EW-ThL2 Flexible 200 mm ALD Oxide, Nitride and Metal Processes N. Singh, C. Hodson, Oxford Instruments Plasma Technology, UK |
| 11:40am | EW-ThL3 Introducing the Dektak D150 Stylus Profiler: Performance, Stability and Value T. Ballinger, G. Anderson, J. Horwitz, Veeco Instruments Inc. |