AVS 53rd International Symposium
    Exhibitor Workshop Thursday Sessions
       Session EW-ThL

Paper EW-ThL1
MM-16: New Spectroscopic Ellipsometer for Fast and Simple Advanced Materials Characterization

Thursday, November 16, 2006, 11:00 am, Room Exhibit Hall

Session: Exhibitor Workshop
Presenter: P. Tivin, HORIBA Jobin Yvon Inc
Authors: P. Tivin, HORIBA Jobin Yvon Inc
E. Teboul, HORIBA Jobin Yvon Inc
Y. Ji, HORIBA Jobin Yvon Inc
Correspondent: Click to Email
HORIBA Jobin Yvon now introduces the MM-16, a new, low-cost spectroscopic ellipsometer dedicated to advanced characterization of a broad range of materials. In addition to the standard measurements of film thickness and optical constants, the MM-16 provides the full polarization states matrix (Mueller matrix) of a sample in less than 2 seconds. This additional capability allows accurate, simple and easy characterisation of anisotropy, retardance and degree of depolarization. With options such as automatic variable angle of incidence (VASE), motorized mapping stage and micro spot, the MM-16 is a powerful and cost effective tool for fast, comprehensive, and simplified materials characterization. Results obtained with the MM-16 for a wide range of applications such as: Displays with Liquid Crystals, ITO, polymers; Coatings with TiO@sub 2@, ZnO, Al@sub 2@O@sub 3@, Y@sub 2@O@sub 3@, ZrO@sub 2@; Semiconductor with AlGaN, AlN, TiN are presented.