AVS 53rd International Symposium
    Electronic Materials and Processing Thursday Sessions

Session EM+AS-ThM
High-k Dielectric Characterization

Thursday, November 16, 2006, 8:00 am, Room 2003
Moderator: A. Rockett, University of Illinois, Urbana-Champaign


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:00am EM+AS-ThM1
A Study of High Dielectric Constant Magnesium Oxide Film Interfaces with Si
L. Yan, R.P. Shrestha, E.A. Irene, University of North Carolina-Chapel Hill, L. Zhong, I. Kim, O. Auciello, Argonne National Lab
8:20am EM+AS-ThM2
Channel Drift Mobility in High-k Transistors from Galvanomagnetic Measurements
R.T. Bate, W.P. Kirk, R. Agrawal, University of Texas at Arlington, R.M. Wallace, B.E. Gnade, G. Pant, University of Texas at Dallas
8:40am EM+AS-ThM3 Invited Paper
Interface Composition and Band Alignment in Nano-electronics
S. Rangan, E. Bersch, R.A. Bartynski, L.V. Goncharova, T. Gustafsson, E. Garfunkel, Rutgers University
9:20am EM+AS-ThM5
Band Offsets Measurements of Metal/High-k/Semiconductor Structures
S. Rangan, E. Bersch, R.A. Bartynski, E. Garfunkel, Rutgers University
9:40am EM+AS-ThM6
A Soft-X-Ray Photoelectron Spectroscopy Study of D-State Contributions to Valence Band States in Nanocrystalline HfO2, TiO2, and Hf1-xTixO2 Alloys
L.B. Fleming, M.D. Ulrich, NC State University, J. Rowe, University of North Carolina at Chapel Hill, C.C. Fulton, G. Lucovsky, NC State University
10:00am EM+AS-ThM7
Line-Width and Symmetry Changes in Jahn Teller Term-Split Sc 3d-States in LaScO3 as a Function of Deposition and Annealing Temperatures
H. Seo, NC State University, L.F. Edge, D.G. Schlom, Penn State University, N.A. Stoute, G. Lucovsky, NC State University
10:20am EM+AS-ThM8
Trends in Core Level Binding Energies of Mixed Oxide Candidates for High-@kappa@ Dielectrics
A. Mathew, University of Delaware, L. Bao, Dupont Inc., K. Demirkan, University of Delaware, C.-G. Wang, G.D. Wilk, ASM America Inc., R.L. Opila, University of Delaware