We report a new fabrication method of nanostructural materials by using selective atomic layer deposition of thin films on patterned self-assmebled monolayers and nanoporous templates. The patterned monolayers define and direct the selective deposition of thin films. This technique has been used successfully to deposit nanostructural materials on technologically important substrates including silicon and gold. Oxide nanotubes with diameter of 30 ~ 200 nm were successfully fabricated by this technique. It allows one-step processing for the fabrication of the freestanding oxide nanotubes. Sub-Ã.ngstrom wall thickness controls in oxide nanotubeâ?T structures can be achieved by this method. The nanostructural amaterials have been investigated by atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS), water contact angles analysis, X-ray diffraction (XRD), transmission electron microscopy (TEM) and UV spectrometer.