AVS 53rd International Symposium
    Thin Film Monday Sessions
       Session TF-MoA

Paper TF-MoA6
Stand-Alone TiO@sub2@ Nanotubes for Nano-Sensors using Atomic Layer Deposition and Focused Ion Beam

Monday, November 13, 2006, 3:40 pm, Room 2022

Session: ALD and Applications II
Presenter: D.K. Cha, University of Texas at Dallas
Authors: D.K. Cha, University of Texas at Dallas
B.K. Lee, University of Texas at Dallas
M.J. Kim, University of Texas at Dallas
J. Kim, University of Texas at Dallas
Correspondent: Click to Email
Various tubular metal oxide nanomaterials such as TiO@sub2@ nanotubes have attracted considerable interest due to their excellent properties for nano-sensors and integrated circuits. In this study, we focus on the characteristic of single TiO@sub2@ nanotubes which are grown by atomic layer deposition (ALD) on nano porous membranes with self-assembled monolayers (SAMs) treatments. The TiO@sub2@ nanotubes are 20-200 nm in diameter with a wall thickness of 5-20 nm. For the electrical characterization of single TiO@sub2@ nanotubes, electrical test structure devices are fabricated on SiO@sub2@/Si wafer patterned with Au/Cr electrodes by focused ion beam (FIB), which has site-specific platinum deposition capability. A single TiO@sub2@ nanotube with a diameter of 200nm shows that the current increases linearly with the applied voltage (-3V to 3V) and resistivity is calculated to be approximately 100 @ohm@ cm. It is also found that the conductance of a single TiO@sub2@ nanotube is affected by the ambient, indicating the surface of TiO@sub2@ nanotube is sensitive to the presence of absorbed species such as water molecular. This conductance changing suggests that individual TiO@sub2@ nanotubes can be used for nano-sensor application. In addition, photo-conduction behaviors of single TiO@sub2@ nanotubes will also be discussed for photovoltaic nano-device applications. This research was supported by a grant (code #: M105KO010026-05K1501-02611) from Center for Nanostructured Materials Technology under 21st Century Frontier R&D programs of the Ministry of Science and Technology, Korea and The State of Texas.