AVS 53rd International Symposium
    Thin Film Monday Sessions
       Session TF-MoA

Paper TF-MoA2
Gas Diffusion Barriers on Polymers Using Al@sub2@O@sub3@ Atomic Layer Deposition

Monday, November 13, 2006, 2:20 pm, Room 2022

Session: ALD and Applications II
Presenter: S.M. George, University of Colorado
Authors: M.D. Groner, University of Colorado
A.A. Dameron, University of Colorado
R.S. McLean, DuPont Central Research & Development
P.F. Carcia, DuPont Central Research & Development
S.M. George, University of Colorado
Correspondent: Click to Email
Diffusion barriers are required to protect thin film devices from the corrosive effects of various gases. One example is flexible organic light-emitting diode (OLED) devices that are susceptible to degradation because of facile permeation of O@sub2@ and H@sub2@O through the plastic substrates. Our recent work has utilized quantitative Ca-tests to measure water vapor transmission rates (WVTRs) through polymers coated with Al@sub2@O@sub3@ ALD films. These Ca-tests have measured WVTRs of 1.4 x 10@super-5@ g/m@super2@/day at 38°C and 5.5 x 10@super-5@ g/m@super2@/day at 60°C for an Al@sub2@O@sub3@ ALD film thickness of ~25 nm on polyethylene naphthalate (PEN). Based on the apparent activation energy, the WVTR at 23°C is estimated to be only 6 x 10@super-6@ g/m@super2@/day. These WVTR values are excellent and close to the targeted WVTRs required for OLEDs. Our earlier measurements used radioactive tracer tests based on HTO permeability to measure WVTRs. These radioactive tracer tests measured higher WVTRs of ~1 x 10@super-3@ g/m@super2@/day at room temperature for an Al@sub2@O@sub3@ ALD film thickness of ~26nm on Kapton polyimide and PEN. The difference between the Ca-test results and the HTO radioactive tracer test results suggests that the HTO test may be influenced by tritium diffusion in addition to HTO diffusion. Additional work is focusing on improvements in diffusion barrier performance using multilayer films composed of Al@sub2@O@sub3@ ALD and other materials.