AVS 53rd International Symposium
    Plasma Science and Technology Tuesday Sessions
       Session PS3-TuP

Paper PS3-TuP7
Amorphous Carbon Coating Mixed with Nano Crystalline Diamonds

Tuesday, November 14, 2006, 6:00 pm, Room 3rd Floor Lobby

Session: Advanced Plasma Deposition Poster Session
Presenter: N. Sakudo, Kanazawa Institute of Technology, Japan
Authors: N. Sakudo, Kanazawa Institute of Technology, Japan
N. Ikenaga, Kanazawa Institute of Technology, Japan
Y. Tashiro, Kanazawa Institute of Technology, Japan
A. Sakamoto, Kanazawa Institute of Technology, Japan
Correspondent: Click to Email
We have developed new carbonic coating that can be applied to machine tools and dies. The coating, which we named hybrid nano-diamond coating, consists of multi layers with nano crystalline diamonds and amorphous carbon that is so-called DLC (diamond like carbon). Usually pure diamond coating had been carried out at a high substrate temperature of around 1000 K by microwave plasma CVD (chemical vapor deposition) using methane diluted with hydrogen. On the other hand, pure DLC coating had been carried out at a lower substrate temperature than 500 K by PVD (physical vapor deposition) using hydrocarbon gases like ethylene, ethane, acetylene and so on. In order to make the new carbonic coating on low temperature substrate, we constructed an apparatus that has two different plasma generators. One is a 2.45 GHz microwave-plasma source with slotted rectangular waveguide surrounding the plasma chamber, and the other is an inductively-coupled plasma source with one-turn loop antenna driven by 13.56 MHz RF power. The microwave plasma is used for nano diamonds and RF plasma for DLC, respectively. The substrate temperature can be kept lower than 500K during the whole process. The coating was applied to cutting-tool chips for a milling machine and the tool life was tested by machining aluminum alloys. In comparison with conventional DLC coating, the hybrid nano diamond coating showed longer life.