AVS 53rd International Symposium
    Plasma Science and Technology Tuesday Sessions
       Session PS3-TuP

Paper PS3-TuP5
Diagnostics of Microwave Plasmas Applied for Organic Layer Deposition

Tuesday, November 14, 2006, 6:00 pm, Room 3rd Floor Lobby

Session: Advanced Plasma Deposition Poster Session
Presenter: S.F. Dribinskiy, Munich University of Applied Sciences, Germany
Authors: S.F. Dribinskiy, Munich University of Applied Sciences, Germany
G. Franz, Munich University of Applied Sciences, Germany
D. Voss, Plasma-Parylene Coating Services, Germany
Correspondent: Click to Email
Polyparylene, a non-critical, non-toxic layer material for long-term applications in the human body, has been deposited by plasma-enhanced chemical vapor deposition of the monomeric species. For that end, a microwave discharge in a pulsed mode has been applied. Important plasma parameters have been evaluated by simultaneous application of Langmuir probe and trace rare gas optical emission spectroscopy. Plasma densities and electron temperature have been found to cover values from an almost dark Langmuir plasma up to 10@super 10@/cm@super 3@ and between 1 and 3.5 eV, respectively. Differences in electron temperature between the two methods were less than 20 %. Due to the skin effect which is already effective beyond plasma densities of some 10@super 9@/cm@super 3@, the plasma is spatially inhomogenous which has been taken care of by measuring at three different positions with the Langmuir probe. Entering from the radially outmost position, the inverted V-shape profiles for plasma density and electron temperature peak in the border reagion. This holds true for argon and parylene. However, the plasma density in parylene is lower by a factor of nearly 10 indicating that this molecule and/or its fragments exhibit a strong power for electronic attachment. The skin effect is also responsible for the decreasing plasma density with growing discharge pressure. Finally, the decay constant has been determined and modeled.