AVS 53rd International Symposium
    Plasma Science and Technology Tuesday Sessions
       Session PS3-TuP

Paper PS3-TuP13
Plasma and Surface Characterisation in the Pulsed Polymerisation of Acrylic Acid Films

Tuesday, November 14, 2006, 6:00 pm, Room 3rd Floor Lobby

Session: Advanced Plasma Deposition Poster Session
Presenter: J.W. Bradley, University of Liverpool, UK
Authors: J.W. Bradley, University of Liverpool, UK
S. Voronin, University of Liverpool, UK
M.R. Alexander, University of Nottingham, UK
Correspondent: Click to Email
The pulsed-plasma polymerization of functional films from organic monomers struck at low pressure in RF discharge cells is a valuable technique for controlling surface chemistry and obtaining good functional retention.@footnote 1@ Despite the usefulness of the pulsed plasma technique, the relationship between the transient plasma parameters during the pulse cycle (typically several milliseconds duration) and the chemical and physical properties of the film has not been extensively investigated. Using state-of-the-art time-resolved mass spectroscopic and electrical probing techniques, the plasma parameters, (neutral and ion flux, ion energy distribution function, plasma density, electron temperature and plasma potential) have been measured in a range of monomer flow rate to applied power ratios and pulse duty cycles and correlated with the surface chemistry obtained by XPS. We have evidence for the importance of heavy ionic species (e.g. [xM-H]@super +@ with x = 2, 3) originating from the plasma in the production of high functional retention films. A growth model for pulsed-plasma polymer films is being developed. @FootnoteText@ @footnote 1@ Rinsch CL, Chen XL, Panchalingam V, Eberhart RC, Wang JH, Timmons RB, Langmuir 12 (12) 2995-3002 1996