AVS 53rd International Symposium | |
Plasma Science and Technology | Tuesday Sessions |
Session PS1-TuP |
Session: | Etching of High-K, Compound Semiconductors and Advanced Materials Poster Session |
Presenter: | H.C. Lee, Sungkyunkwan University, Korea |
Authors: | H.C. Lee, Sungkyunkwan University, Korea J.B. Park, Sungkyunkwan University, Korea J.W. Bae, Sungkyunkwan University, Korea G.Y. Yeom, Sungkyunkwan University, Korea |
Correspondent: | Click to Email |