AVS 53rd International Symposium
    Plasma Science and Technology Thursday Sessions
       Session PS-ThP

Paper PS-ThP14
New Method for Measurement of Electron Temperature using Wave Cutoff Frequency and Wave Absorption Frequency in Plasmas

Thursday, November 16, 2006, 5:30 pm, Room 3rd Floor Lobby

Session: High Pressure Discharges and Novel Diagnostics & Sources Poster Session
Presenter: J.H. Kim, Korea Research Institute of Standards and Science
Authors: J.H. Kim, Korea Research Institute of Standards and Science
D.-J. Seong, Korea Research Institute of Standards and Science
Y.H. Shin, Korea Research Institute of Standards and Science
Correspondent: Click to Email
Wave absorption probe@footnote 1@ and wave cutoff probe@footnote 2@ were developed for the measurement of electron density. The wave absorption probe relies on the resonant absorption of surface waves excited in a cavity at the antenna head. A network analyzer feeds a microwave to the antenna and displays the frequency dependence of power absorption by measuring reflected power. The wave absorption frequency can give the electron density when the electron temperature is known. For measuring the cutoff frequency, a microwave is introduced through the radiating antenna to the plasma and the transmitted wave is detected on the other antenna connected to the receiving port of network analyzer. The wave cutoff frequency can directly give the electron density. Therefore, we can measure both of the absorption frequency and the cutoff frequency with one cutoff probe system. In dispersion relation of surface wave, the absorption frequency is related with the electron density and the electron temperature. Therefore, we can deduce the electron temperature using the absorption frequency and the electron density measured by the cutoff frequency. The measured electron temperature is compared with those got by using a Langmuir probe. @FootnoteText@ @footnote 1@ K. Nakamura et al., J. Vac. Sci. Technol.A 21, 325 (2003)@footnote 2@ J. H. Kim et al., Review of Scientific Instruments Vol. 75, 2706 (2004) .