AVS 53rd International Symposium | |
Manufacturing Science and Technology | Tuesday Sessions |
Session MS-TuA |
Session: | Process Integration and Modeling for Nano-scale Semiconductor Devices |
Presenter: | C.T.M. Kwok, University of Illinois at Urbana-Champaign |
Authors: | E.G. Seebauer, University of Illinois at Urbana-Champaign C.T.M. Kwok, University of Illinois at Urbana-Champaign R. Vaidyanathan, University of Illinois at Urbana-Champaign |
Correspondent: | Click to Email |