AVS 52nd International Symposium
    Manufacturing Science and Technology Wednesday Sessions

Session MS+MN+NS-WeM
Advanced Manufacturing for Nano-scale Devices & Systems

Wednesday, November 2, 2005, 8:20 am, Room 207
Moderators: L. Larson, SEMATECH, A. Testoni, Varian Semiconductor Equipment Associates


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:20am MS+MN+NS-WeM1 Invited Paper
Government Directions in Nanomanufacturing
J.S. Murday, Naval Research Laboratory
9:00am MS+MN+NS-WeM3 Invited Paper
Next Generation Semiconductor Devices based on Carbon Nanotubes
T. Rueckes, Nantero, Inc.
10:20am MS+MN+NS-WeM7 Invited Paper
Assembly Pathway to Nanotechnology: Meso to Micro to Nano
J.R. Von Ehr, Zyvex Corporation