AVS 52nd International Symposium
    Manufacturing Science and Technology Wednesday Sessions
       Session MS+MN+NS-WeM

Invited Paper MS+MN+NS-WeM7
Assembly Pathway to Nanotechnology: Meso to Micro to Nano

Wednesday, November 2, 2005, 10:20 am, Room 207

Session: Advanced Manufacturing for Nano-scale Devices & Systems
Presenter: J.R. Von Ehr, Zyvex Corporation
Correspondent: Click to Email

Zyvex is the first molecular nanotechnology company, with a vision of developing adaptable, affordable, molecularly precise manufacturing. This talk will show the progression from macroscopic manipulation, to meso-scale (millimeter), to micro-scale, and ultimately to nano-scale. Zyvex has several years of experience in building and selling nanomanipulation tools, as well as a number of microassembled MEMS products under development, including a miniature mass spectrometer. New work to be discussed is an approach to Atomically Precise Manufacturing, using UHV STM-mediated depassivation of silicon followed by repetitive cycles of Atomic Layer Deposition/Epitaxy to build 3D structures with atomic precision.