| AVS 52nd International Symposium | |
| Exhibitor Workshop | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 12:00pm | EW-TuL1 Cold Cathode/Quartz Crystal Combination Gauge E. Drubetsky, Televac, B.R.F. Kendall, Elvac Associates, N. Matsumoto, Tokyo Electronics Co., Ltd, Japan, N. Ohsako, VISTA Corporation, H. Hojoh, Vacuum Products Corp. |
| 12:20pm | EW-TuL2 Seal Life Test of 300mm Hybrid Chamber in PVD Thermal Cycle Environment J. Zhou, M. Evans, J. Klein, J. Vargas, Y. Zhou, R. Schmieding, H. Gao, D. Paul, B. Stimson, Applied Materials |
| 12:40pm | EW-TuL3 Robust System Identification and Optimized Tuning for Control of Evaporation Processes: Benchmark Study Results of Manufacturing Performance G. Reimann, B. Vattiat, M. Gevelber, Cyber Materials, LLC, J. Hildebrand, C. Hildebrand, Maxtek, Inc. |
| 1:00pm | EW-TuL4 Internet-Enabled Vacuum Training System R. Groom, S. Hansen, MKS Instruments, Inc., Y.J. Lee, M. Moslehi, Semizone, Inc. |
| 1:20pm | EW-TuL5 CompuVac NT - A New Generation Vacuum System Design Tool P.J. Klingner, Leybold Vacuum GmbH, Germany |