AVS 52nd International Symposium
    Exhibitor Workshop Tuesday Sessions
       Session EW-TuL

Paper EW-TuL4
Internet-Enabled Vacuum Training System

Tuesday, November 1, 2005, 1:00 pm, Room Exhibit Hall C&D

Session: Vacuum Components and Measurement Optimization
Presenter: S. Hansen, MKS Instruments, Inc.
Authors: R. Groom, MKS Instruments, Inc.
S. Hansen, MKS Instruments, Inc.
Y.J. Lee, Semizone, Inc.
M. Moslehi, Semizone, Inc.
Correspondent: Click to Email
Realizing that an understanding of vacuum and related process monitoring and control instrumentation is a key area for individuals who are technical workers in the semiconductor industry, MKS developed an integrated set of instructional literature and hardware for the teaching of vacuum and instrumentation practice. At the center is a table-top vacuum training system (VTS) which replicates the features and functions of a full-scale process tool. In 2004 MKS Instruments partnered with Semizone, Inc. to implement an Internet-enabled version of this vacuum training system. The system consists of most components found in a typical vacuum process tool including plasma chamber, high vacuum valve, throttling valve, mass flow controller, capacitance manometer, Pirani gauge, hot cathode ion gauge, RGA, and other components. Because the system was re-designed and built as an Internet enabled tool, all components (including components that are typically manually controlled) can be remotely actuated. The various sensors and actuators on the VTS interface with the equipment controller/server through adapters that convert legacy protocols into TCP/IP protocol. The equipment controller/server obtains the sensor readings and provides the control commands to the VTS. The equipment controller/server also communicates with the end user through client software using SOAP/XML protocol over a secure intranet or Internet connection. The client software provides graphical user interface and data analysis/interpretation tools. The remote access to the VTS is integrated with other Internet-based content including lecture modules, live video feeds, discussion forum, and online simulators.