AVS 52nd International Symposium
    Exhibitor Workshop Tuesday Sessions
       Session EW-TuL

Paper EW-TuL1
Cold Cathode/Quartz Crystal Combination Gauge

Tuesday, November 1, 2005, 12:00 pm, Room Exhibit Hall C&D

Session: Vacuum Components and Measurement Optimization
Presenter: E. Drubetsky, Televac
Authors: E. Drubetsky, Televac
B.R.F. Kendall, Elvac Associates
N. Matsumoto, Tokyo Electronics Co., Ltd, Japan
N. Ohsako, VISTA Corporation
H. Hojoh, Vacuum Products Corp.
Correspondent: Click to Email
Different types of combination vacuum gauges have been introduced lately in the attempt to cover a wide range of measurements from atmosphere down to ultra high vacuum. In most cases they utilize one thermal conductivity type of gauge (usually Pirani) and one ionization gauge (hot or cold cathode). A combination gauge containing a quartz crystal and a cold cathode sensor is described.The miniature quartz oscillator in the shape of a tuning fork is located in a small isolated chamber of the cold cathode tube.This design allows expansion of the measurement range from 10@-9@ Torr to atmospheric pressure.Tests confirmed measurement error is within ±10% for pressure from 0.001 to 760 Torr. Repeatability data and durability against process gases are also discussed.