AVS 52nd International Symposium
    Thin Films Wednesday Sessions
       Session TF-WeM

Paper TF-WeM5
Effects of TiO@sub x@ PVD Deposition Parameters on the Preferred Orientation and Adhesion of Pt Films on @gamma@-Al@sub 2@O@sub 3@

Wednesday, November 2, 2005, 9:40 am, Room 306

Session: Mechanical and Tribological Properties of Thin Films
Presenter: E. Derniaux, ONERA France
Authors: E. Derniaux, ONERA France
P. Kayser, ONERA France
C. Gageant, ONERA France
C. Sanchez, ONERA France
D. Boivin, ONERA France
Correspondent: Click to Email
PVD TiO@sub x@ films are studied in order to improve the adhesion of Pt/AlN/Pt piezoelectric transducers on @gamma@-Al@sub 2@O@sub 3@/NiCoCrAlY/superalloy components. Thick (2 µm) TiO@sub x@ films deposited by RF reactive cathodic sputtering on @alpha@-Al@sub 2@O@sub 3@ substrates were analysed by X-ray diffraction (XRD) and scanning electron microscopy equipped with X-ray spectroscopy (SEM/EDX). The influence of substrate temperature, O@sub 2@/(Ar+O@sub 2@) ratio in the plasma gas and annealing (1050°C, 1h, in air) on structural properties, morphology and chemical composition was observed. Thin (@<=@100 Å) TiO@sub x@ adhesion layers and Pt films were sputtered on @alpha@-Al@sub 2@O@sub 3@. The effects of TiO@sub x@ deposition parameters on the adhesion and the orientation of as-deposited and annealed Pt films were examined respectively by pull off test and XRD. Results showed the (111) preferred orientation and the good adhesion of Pt films. Finally, the selected TiO@sub x@ deposition parameters were applied on @gamma@-Al@sub 2@O@sub 3@/NiCoCrAlY/superalloy substrates. Adhesion properties of annealed Pt films on @gamma@-Al@sub 2@O@sub 3@ and TiO@sub x@/@gamma@-Al@sub 2@O@sub 3@ were evaluated, the results showed a drastic improvement of the pull off force (0 to 1000 kg.cm@super -2@) by using the TiO@sub x@ 'glue layer'. The adhesion layer led also to a higher (111) preferential orientation of the Pt films.