AVS 52nd International Symposium
    Plasma Science and Technology Tuesday Sessions
       Session PS-TuP

Paper PS-TuP15
Extraction and Collimation of Laser Photoionized Neodymium Ion Beam

Tuesday, November 1, 2005, 4:00 pm, Room Exhibit Hall C&D

Session: Plasma Science and Technology Poster Session
Presenter: K.T. Tamura, Japan Atomic Energy Research Institute
Correspondent: Click to Email

Based on the laser isotope separation, ions are produced by the selective photoionization of evaporated atoms. By the effective extraction and collection of these ions, they are considered to be a useful ion source for the applications such as ion implantation. To increase the beam intensity for these applications, a pair of semispherical electrodes was set outside the parallel plate electrodes, and the obtained intensity distributions were measured by scanning a multichannel Faraday cup. Atomic beam of neodymium were generated by electron beam evaporation, and was introduced between electrodes for ion extraction. The atomic beam was photoionized by the irradiation of the third harmonics of YAG laser operated at 10 Hz, and the produced ions were extracted from the electrode. The intensity distributions of the ion beam were detected with a multichannel Faraday cup which has five detection holes arranged horizontally. The distributions were mapped by vertically scanning the detector manually. The vertical and horizontal widths of the ion beam at the detector were reduced by the electric field formed with these electrodes. The central ion beam intensity increased about 36 times compared with that in the case without the additional electric field. The energy spread of the neodymium ion beam corresponded to the potential of the laser photoionized region between ion extraction electrodes. Ions with the central energies of 300~1400 eV were then produced, and it was shown from ion distribution measurements that collimated ion beam was produced for these ion energies. These results show that the application of these electrodes is useful for the extraction and collimation of the laser photoionized ions.