AVS 52nd International Symposium
    Plasma Science and Technology Friday Sessions
       Session PS-FrM

Paper PS-FrM3
Comparison of Hydrocarbon and Fluorocarbon Polyatomic Ion Beam Treatment of Polystyrene

Friday, November 4, 2005, 9:00 am, Room 302

Session: Plasma Surface Interactions III
Presenter: S.B. Sinnott, University of Florida
Authors: W.-D. Hsu, University of Florida
I. Jang, University of Florida
S.B. Sinnott, University of Florida
Correspondent: Click to Email
Plasma processing is widely used to chemically modify polymer surfaces and deposit thin films. It is well-accepted that polyatomic ions and neutrals within low-energy plasmas have a significant effect on the surface chemistry induced by the plasma. Here, the detailed chemical modifications that result from of the deposition of beams of polyatomic fluorocarbon ions (C@sub 3@F@sub5@@super +@ and CF@sub 3@@super +@) and hydrocarbon ions (C@sub 3@H@sub 5@@super +@ and CH@sub 3@@super +@) on polystyrene surfaces at experimental fluences are identified using classical molecular dynamics (MD) simulations. The simulations make use of a reactive bond-order potential for hydrocarbons that has been extended to include fluorine and an optimized MD program. Based on the predicted accumulation of ion-surface collisions and accompanying chemistry, we elucidate how the unique chemical properties of the incident ions affect surface modification. We also determine the important differences and similarities in the chemical interactions of fluorocarbon and hydrocarbon ions with the polystyrene. This work is supported by the National Science Foundation through grant number CHE-0200838.