AVS 52nd International Symposium
    Exhibitor Workshop Wednesday Sessions
       Session EW-WeL

Paper EW-WeL5
A New Approach to SPM Control Electronics

Wednesday, November 2, 2005, 1:20 pm, Room Exhibit Hall C&D

Session: XPS and SPM New Developments and Applications
Presenter: M. Maier, Omicron NanoTechnology, Germany
Authors: M. Maier, Omicron NanoTechnology, Germany
B. Uder, Omicron NanoTechnology, Germany
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We developed a control system that couples advances in digital electronics with the requirements of the latest SPM applications to offer an extremely high level of experimental flexibility and data processing control. Fundamental to its modular philosophy are a series of advanced digital boards each equipped with CPU, DSP and logic elements. Programmable elements are "soft-wired" opening up to new functionality such as multi- channel feedback, input/output trigger control, pre-emptive feedback, and non-orthogonal and non-linear scan generation.