AVS 52nd International Symposium
    Exhibitor Workshop Wednesday Sessions
       Session EW-WeL

Paper EW-WeL1
Improvement of the Quantification from XPS Data Using Predetermined Spectrometer-Transmission Functions with UNIFIT 2004

Wednesday, November 2, 2005, 12:00 pm, Room Exhibit Hall C&D

Session: XPS and SPM New Developments and Applications
Presenter: R. Hesse, University of Leipzig, Germany
Authors: R. Hesse, University of Leipzig, Germany
P. Streubel, University of Leipzig, Germany
R. Szargan, University of Leipzig, Germany
Correspondent: Click to Email
The reliability of the quantification from XPS data was improved using calibrated intensity scales of the photoelectron spectrometer ESCALAB 220 iXL. Two different sub-routines, survey-spectra approach (SSA) and minimizing the error of the quantified peak-area approach of standard peaks (QPA), for estimating the transmission functions T(E) of different acquisition modes of any photoelectron spectrometers are integrated in the software UNIFIT 2004. For the method SSA the spectra from Au, Ag and Cu measured on the Metrology Spectrometer II of NPL have been used. The estimation of T(E) using the method QPA was carried out by means of the peak areas from Au 4f, Au 4d, Au 4p@sub 3/2@, Ag 3d, Ag 3p@sub 3/2@, Cu 3p, Cu 2p@sub 3/2@, Ge 3d and Ge 2p@sub 3/2@ lines measured for Mg K@alpha@ and Al K@alpha@ X-rays. The theoretical basis of quantification as well as the results of the transmission functions T(E) (E - kinetic energy) of the spectrometer have been considered for both approaches SSA and QPA.. In the presented paper the influence of pass energies (10 eV and 50 eV), lens modes (Large Area, Large Area XL, Small Area 150) and X-ray sources (Al/Mg-twin and Al-mono) on T(E) is discussed. It was found that the form T(E) = a+bE@super c@ (a, b, c - parameters) gives an appropriate approach to describe T(E) of the studied spectrometer modes in many cases. In order to demonstrate the applicability of the calculated functions T(E), a quantitative analysis of the sample Ni90Cr10 was performed. Keyword: UNIFIT, Spectrum analysis software, Photoelectron spectroscopy, Quantification, Transmission function, Intensity/energy response function.