AVS 52nd International Symposium
    Applied Surface Science Wednesday Sessions
       Session AS-WeA

Paper AS-WeA10
TOF-SIMS Imaging of OLED Devices using a Au Cluster Ion Beam

Wednesday, November 2, 2005, 5:00 pm, Room 206

Session: SIMS Cluster Probe Beams and General Topics
Presenter: S.R. Bryan, Physical Electronics
Authors: S.R. Bryan, Physical Electronics
J.S. Hammond, ULVAC-PHI, Inc.
N. Sekiya, ULVAC-PHI, Inc.
A. Yamamoto, ULVAC-PHI, Inc.
Correspondent: Click to Email
Organic light emitting diode (OLED) technology is a growing research area which may lead to next generation display and lighting commercial products. OLED is based on the use of multi-layers of thin molecular or polymer materials which emit light directly when a voltage is applied. The total thickness of the multi-layer film structure is usually less than 500nm. The organic layers can be doped with specific enhancing molecules to get the desired brightness and color. This new cutting edge technology based on patterned organics requires analytical techniques that can characterize the organic structure of the devices with submicron spatial resolution and good depth resolution. TOF-SIMS offers one of the only techniques that can provide the needed spatial resolution with molecular specificity. One of the most important commercial developments in TOF-SIMS instrumentation in recent years has been the introduction of cluster ion beams for enhancement of organic molecular secondary ion yields. Although Ga+ LMIG sources, which have been used in TOF-SIMS since 1990, has sufficient spatial resolution for most applications, the secondary ion yield of organic molecules from Ga+ sputtering is insufficient for many applications. Development of the Au LMIG emitter, which allows TOF-SIMS analysis with Au+, Au2+ or Au3+, extends the capabilities of TOF-SIMS to image patterned organic materials. The capabilities of imaging with the Au LMIG emitter will be compared to the Ga emitter for characterization of OLED devices. Spatial resolution, damage cross-sections, and ultimate detection limits will be compared between Ga, Au, Au2, and Au3 for typical molecules used in OLED devices.