AVS 51st International Symposium
    MEMS and NEMS Tuesday Sessions
       Session MN-TuM

Paper MN-TuM11
Use of Plasma Polymerisation Process for Fabrication of Micro Electromechanical System (MEMS) for Micro-Fluidic Devices

Tuesday, November 16, 2004, 11:40 am, Room 213C

Session: MEMS and NEMS: Enabling Tools for Scientific Research
Presenter: M. Dhayal, Dongshin University, South Korea
Authors: M. Dhayal, Dongshin University, South Korea
H.G. Hyung, Dongshin University, South Korea
H.J. Lee, Chonnam National University, South Korea
J.S. Choi, Dongshin University, South Korea
Correspondent: Click to Email
In recent years the need for nano electromechanical system (NEMS) and micro electromechanical system (MEMS) devises in chemistry, biology and medical field has increased the interest of researcher to improve and develop new fabrication techniques to capable of building 3D structures with materials othe than silicon or with silicon. In our research we are developing a well-controlled plasma polymerisation process reator to fabricate NEMS and MEMS devises. A comparison of performance of MEMS fabricated using conventional techniques such as photolithography and reactive ion etching in our study has been also investigated. These devises are planed to use for fabrication of micro pumps for micro-fluidic devices.