AVS 51st International Symposium
    Electronic Materials and Processing Tuesday Sessions

Session EM-TuM
Contacts and Metallization

Tuesday, November 16, 2004, 8:20 am, Room 304B
Moderator: S.E. Mohney, The Pennsylvania State University


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:40am EM-TuM2
Near-Surface Defects and Schottky Barrier Formation at Au/ZnO(000-1) Interfaces
H.L. Mosbacker, Y.M. Strzhemechny, P.E. Smith, B.D. White, The Ohio State University, D.C. Look, Wright State University, L.J. Brillson, The Ohio State University
9:00am EM-TuM3 Invited Paper
Investigation of the Sources of Variations in the Electrical Characteristics of Ohmic and Rectifying Contacts
L.M. Porter, F.A. Mohammad, D.J. Ewing, Carnegie Mellon University, R.R. Ciechonski, M. Syväjärvi, R. Yakimova, Linköping University, Sweden
9:40am EM-TuM5
Simultaneous Formation of p- and n-type Ohmic Contacts to 4H-SiC using Ni/Ti/Al Contact Materials
S. Tsukimoto, T. Sakai, M. Murakami, Kyoto University, Japan
10:00am EM-TuM6
Fabrication, Processing and Specific Contact Resistance Measurements of Contacts to Semiconductor Nanowires
S. Dey, Y. Wang, K.-K. Lew, T.S. Mayer, J.M. Redwing, S.E. Mohney, The Pennsylvania State University
10:20am EM-TuM7 Invited Paper
CMOS Metal Gate Implementation
C. Cabral, Jr., V. Narayanan, J. Kedzierski, M. Copel, C. Lavoie, J.L. Jordan-Sweet, E.P. Gusev, IBM T.J. Watson Research Center, J.M.E. Harper, University of New Hampshire
11:00am EM-TuM9
Physical and Electrical Properties of Mo@sub X@ N@sub Y@ and Mo@sub X@ Si@sub Y@ N@sub Z@ as Gate Electrode Materials for MOS Devices.
R.M. Wallace, P. Zhao, P. Sivasubramani, I.S. Jeon, University of Texas at Dallas, J. Lee, J.Y. Kim, Kookmin University, Korea, M. Kim, B.E. Gnade, University of Texas at Dallas
11:20am EM-TuM10
Influence of Interactions Between Ta-N Films and Low Dielectric Constant Materials on the Stability of Copper Interconnection
C.-C. Chang, National Cheng Kung University, Taiwan, S.-K. JangJian, Taiwan Semiconductor Manufacturing Company, Taiwan, J.-S. Chen, National Cheng Kung University, Taiwan
11:40am EM-TuM11
Low Resistivity Germanides
S. Gaudet, Ecole Polytechnique de Montreal, Canada, C. Lavoie, IBM T.J. Watson Research Center, C. Detavernier, University of Ghent, Belgium, P. Desjardins, Ecole Polytechnique de Montreal, Canada