AVS 50th International Symposium
    Thin Films Wednesday Sessions

Session TF-WeM
Optical Thin Films and Photovoltaics I

Wednesday, November 5, 2003, 8:20 am, Room 329
Moderator: R. Sargent, OCLI


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:20am TF-WeM1
Multilayer Optical Coatings Using Closed Field Magnetron Sputtering
J.M. Walls, D.G. Gibson, J. Hampshire, D.G. Teer, Applied Multilayers Ltd, UK
8:40am TF-WeM2
Smooth Optical Thin Film Formation by Oxygen Cluster Ion Beam Assisted Depositions
N. Toyoda, I. Yamada, Himeji Institute of Technology, Japan
9:00am TF-WeM3
Scandium and Vanadium Multilayer Mirrors: Working Towards High Reflectivity in the Extreme Ultraviolet
G. Acosta, D. Allred, R. Davis, Brigham Young University
9:20am TF-WeM4
Improvement of Reproducibility in Deposition Rate of MgF@sub 2@ Film Prepared by an rf Sputtering Technique named Keep Molecular Sputtering Method
K. Kawamata, T. Deguchi, Olympus Optical Co., Ltd., Japan, E. Kusano, A. Kinbara, Kanazawa Institute of Technology, Japan
9:40am TF-WeM5
Optical Properties and Microstructure of Plasma Deposited Ta@sub 2@O@sub 5@ and Nb@sub 2@O@sub 5@ Optical Thin Films
H. Szymanowski, J.-P. Masse, O. Zabeida, J.E. Klemberg-Sapieha, L. Martinu, Ecole Polytechnique of Montreal, Canada
10:00am TF-WeM6
The Anneal Behavior of Reactively Sputtered HfN Films
J. Lannon Jr., C.C. Pace, S. Goodwin, MCNC Research and Development Institute, S. Solomon, Acumen Consulting, P. Bryant, J. Oleson, Santa Barbara Infrared, Inc.